Turbomolecular pump

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Cross section of turbomolecular pump with impeller blades and stator

Turbomolecular Pump - vacuum pump for high quality vacuum.

Structure and principle of operation

The two components of the turbine pump are the following:

The rotor blades are arranged radially on the axle and the stator blade on the outer casing. The blade plane is not perpendicular to the axis, but curved at an angle. The angle of rotation of the rotor blades is opposite to the angle of rotation of the stator vanes (mirror image) and the rotor rims are prefaced with stator rims.

The rotor is rotated by giving the particle an air velocity, so that it moves in the direction of the pump outlet. In this way, particles are removed from the inside of the vacuum chamber and the pressure inside the chamber decreases. The pump impeller rotates very quickly so that the speed of the blades is comparable to that of the thermal motions of the particles. Rotation speed can be up to hundred thousand revolutions per minute. Work parameters

The turbomolecular pump can not operate at atmospheric pressure when the free path of air molecules is too short and requires the use of another pump to obtain a 1 Pa vacuum. Depending on the specific design and application, the vacuum is from 10 ÷ 10 Pa. The pumping speed varies from a dozen liters per second in laboratory pumps to thousands of liters per second in industrial installations.

In standard laboratory pumps, the rotor rotates 800 (older pumps) or 1500 (newer pumps) revolutions per second (48,000 and 90,000 revolutions per minute respectively).

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